Microtechnology and MEMS studies was started in the beginning of 1990's at Faculty of Science and Engineering, Waseda University. Microsensors and MEMS fluidic devices were developed using Micro Technology Laboratory. In 2001, Nano Technology Research Center (NTRC) which has micro/nonofabrication and measurement facilities was established. Nano/micro fabrication technologies for electronics, photonics and energy applications have been developed using these facilities. Micro/nano fluidic devices and systems for chemical, biochemical and medical applications have been main topics of inter university collaboration works. Almost two hundred students and researchers use NTRC for their advanced researches.